MOCVD PRECURSORS
MOCVD 前驅物
III/V – COMPOUNDS
TBAs
Tertiarybutylarsine
TMAs
Trimethylarsine
DETBAs
Diethyltertiarybutylarsine
TBP
Tertiarybutylphosphine
DETBP
Diethyltertiarybutylphosphine
TBHy
Tertiarybutylhydrazine
UDMHy
Dimethylhydrazine
TMSb
Trimethylantimony
TESb
Triethylantimony
TMBi
Trimethylbismuth
TEB
Triethylboron
TTBB
Tritertiarybutylboron
TMAl
Trimethylaluminum
TTBAl
Tris(tertiarybutyl)aluminium
TMGa
Trimethylgallium
TEGa
Triethylgallium
TTBGa
Tritertiarybutylgallium
TMIn
Trimethylindium
DADI
Dimethylaminopropyl-dimethyl-indium
II/VI – COMPOUNDS
DTBS
Ditertiarybutylsulphide
DiPSe
Diisopropylselenide
DMCd
Dimethylcadmium
DOPANTS
CBr4
Carbontetrabromide
CCl3Br
Carbontribromidechloride
DTBSi
Ditertiarybutylsilane
CP2Fe
Ferrocene
DMZn
Dimethylzinc
DEZn
Diethylzinc
DETe
Diethyltellurium
ETCHING MATERIALS
TBCl
Tertiarybutylchloride