MOCVD PRECURSORS
MOCVD 前驅物

III/V – COMPOUNDS

TBAs

Tertiarybutylarsine

TMAs

Trimethylarsine

DETBAs

Diethyltertiarybutylarsine

TBP

Tertiarybutylphosphine

DETBP

Diethyltertiarybutylphosphine

TBHy

Tertiarybutylhydrazine

UDMHy

Dimethylhydrazine

TMSb

Trimethylantimony

TESb

Triethylantimony

TMBi

Trimethylbismuth

TEB

Triethylboron

TTBB

Tritertiarybutylboron

TMAl

Trimethylaluminum

TTBAl

Tris(tertiarybutyl)aluminium

TMGa

Trimethylgallium

TEGa

Triethylgallium

TTBGa

Tritertiarybutylgallium

TMIn

Trimethylindium

DADI

Dimethylaminopropyl-dimethyl-indium

II/VI – COMPOUNDS

DTBS

Ditertiarybutylsulphide

DiPSe

Diisopropylselenide

DMCd

Dimethylcadmium

Microscope

DOPANTS

CBr4

Carbontetrabromide

CCl3Br

Carbontribromidechloride

DTBSi

Ditertiarybutylsilane

CP2Fe

Ferrocene

DMZn

Dimethylzinc

DEZn

Diethylzinc

DETe

Diethyltellurium

ETCHING MATERIALS

TBCl

Tertiarybutylchloride